Hari, S. (author), van Dorp, Willem F. (author), Mulders, Johannes J.L. (author), Trompenaars, Piet H.F. (author), Kruit, P. (author), Hagen, C.W. (author) Structures fabricated using focused electron beam-induced deposition (FEBID) have sloped sidewalls because of the very nature of the deposition process. For applications this is highly undesirable, especially when neighboring structures are interconnected. A new technique combining FEBID and focused electron beam-induced etching (FEBIE) has...
journal article 2024
