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Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), Chu Duc, T. (author), Sarro, P.M. (author)A powerful and effective design of a polymeric thermal microactuator is presented. The design has SU-8 epoxy layers filled and bonded in a meandering silicon (Si) microstructure. The silicon microstructure reinforces the SU-8 layers by lateral restraint. It also improves the transverse thermal expansion coefficient and heat transfer for the...journal article 2007