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Chemical vapour deposition of tungsten by H2 reduction of WCl6. Fourth European workshop on refractory metals and silicides: Selected papers, Saltsjobaden, Sweden, March 24-27, 1991
Ammerlaan, J.A.M. (author), Boogaard, D.R.M. (author), Van der Put, P.J. (author), Schoonman, J. (author)
journal article 1991
document
Kinetics of tungsten low-pressure chemical-vapor deposition using WF
6 and SiH
4 studied by in situ growth-rate measurements
Ammerlaan, J.A.M. (author), Van der Put, P.J. (author), Schoonman, J. (author)
journal article 1993