Curvature Manipulation of Photomasks - Enhancing the imaging performance of immersion lithography equipment

This thesis investigates the feasibility of a photomask curvature manipulator in immersion lithography systems.

Exploiting Dynamics in robotic arms with repetitive tasks

Since the industrial revolution, machines have taken over many tasks from humans, increasing labor productivity and prosperity. In the 20th century, the introduction of robots created a second wave of automation, increasing the labor productivity even further. In order to create a third wave of automation, it is necessary to develop a new...

Guidance control and dynamics of a new generation of geostationary satellites