Liu, Hanqing (author), Basuvalingam, Saravana B. (author), Lodha, S.V. (author), Bol, Ageeth A. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Verbiest, G.J. (author) Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate...
journal article 2023
