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Iervolino, E. (author), Riccio, M. (author), Van Herwaarden, A.W. (author), Irace, A. (author), Breglio, G. (author), Van der Vlist, W. (author), Sarro, P.M. (author)This paper investigates the temperature dependence of the resonance frequency of thermogravimetric (TG) devices for tip heating over the temperature range of View the MathML source 25–600?C. The resonance frequency of a fabricated TG device shows to be temperature independent for tip heating up to about View the MathML source600?C. This allows a...journal article 2010
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P. (author), Bernini, R. (author)We report the design and the fabrication of an integrated optofluidic ring resonator based on liquid core antiresonant reflecting optical waveguide (ARROW) operating around ?=635nm with a water filled core (nc=1.33). This waveguide permits a strong coupling between light and analyte as the same microchannel can be used for delivering sample and...conference paper 2011
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Rajaraman, V. (author), Pakula, L.S. (author), Yang, H. (author), French, P.J. (author), Sarro, P.M. (author)Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...journal article 2011
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Alan, T. (author), Aravindh, V. (author), Wunnicke, O. (author), Sarro, P.M. (author)Very thin piezoelectric cantilevers based on AlN layers using titanium Ti thin film electrodes are fabricated and characterized. By optimizing the Ti sputtering parameters, a very low stress (156 MPa) layers stack with high crystallinity and strong (002) orientation of the AlN films is obtained. Finally, a simple fabrication process, fully CMOS...journal article 2011
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Mele, L. (author), Rossi, T. (author), Riccio, M. (author), Iervolino, E. (author), Santagata, F. (author), Irace, A. (author), Breglio, G. (author), Creemer, J.F. (author), Sarro, P.M. (author)This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as...journal article 2011
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...journal article 2011
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Wei, J. (author), Magnani, S. (author), Sarro, P.M. (author)This paper presents a submicron suspended piezoresistive silicon-beam structure as a basic sensing element to replace the conventional piezoresistors, so to improve the detection sensitivity. The alternative element benefits from the increase of the induced stress, which is locally concentrated on the suspended submicron beam. This approach...journal article 2011
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Li, S.J. (author), Shen, C. (author), Sarro, P.M. (author)This paper presents a silicon micromachined filter for micro- and nanoparticles. The filter is vertical and completely buried beneath the surface. The buried aspect allows additional features to be integrated above the filter, while the vertical aspect allows the creation of highly uniform pores and efficient use of die area. The filter is...journal article 2011
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Vendelbo, S.B. (author), Creemer, J.F. (author), Helveg, S. (author), Morana, B. (author), Mele, L. (author), Molenbroek, A.M. (author), Sarro, P.M. (author), Zandbergen, H.W. (author), Kooyman, P.J. (author)Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.journal article 2011
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Estevez, P. (author), Bank, J. (author), Porta, M. (author), Wei, J. (author), Sarro, P.M. (author), Tichem, M. (author), Staufer, U. (author)This paper presents the design, fabrication and characterization of a piezoresistive 6 Degrees of Freedom (DOF) force and torque sensor to be used in micro-manipulation. The mechanical structure of the device consists of 7 suspended beams and a calibration structure, which can be replaced by micro-manipulation tools such as micro-grippers or...journal article 2011
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- French, P.J. (author), Sarro, P.M. (author) book chapter 2012
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)In this work we review recent results of our work on optofluidics. We show that single mode optofluidic waveguides with low loss can be realized using antiresonant reflecting optical confinement (ARROW). These waveguides can be fabricated using full standard silicon technology or hybrid silicon-polymer processes. ARROW waveguides have been used...conference paper 2012
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Alan, T. (author), Yokosawa, T. (author), Gaspar, J. (author), Pandraud, G. (author), Paul, O. (author), Creemer, F. (author), Sarro, P.M. (author), Zandbergen, H.W. (author)Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high...journal article 2012
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- Purniawan, A. (author), Pandraud, G. (author), Vakalopoulos, K.A. (author), French, P.J. (author), Sarro, P.M. (author) conference paper 2012
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Pandraud, G. (author), Purniawan, A. (author), Margallo-Balbás, E. (author), Sarro, P.M. (author)We fabricated horizontal slot waveguides using two low temperature deposition techniques ensuring the full compatibility of the processes with CMOS technology. Slots width as thin as 45 nm with smooth slot surfaces can easily be fabricated with simple photolithographic steps. Fundamental TM-like slot mode in which the E-field is greatly enhanced...conference paper 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...journal article 2012
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Wei, J. (author), Ye, H. (author), Van Zeijl, H.W. (author), Sarro, P.M. (author), Zhang, G.Q. (author)A micro-electro-mechanical-system (MEMS) based, temperature triggered, switch is developed as a cost-effective solution for smart cooling control of solid-state-lighting systems. The switch (1.0x0.4 mm2) is embedded in a silicon substrate and fabricated with a single-mask 3D micro-machining process. The device switches on at a designed...journal article 2012
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Sarro, P.M. (author)Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams with a thin PECVD silicon nitride (SiN) layer. Very good linearity and high deflection, up to 19 nm/V of actuation deflection for 200 ?m long cantilevers, at quasi-static mode, is obtained for a 500 nm SiN top layer. This value is three times larger...journal article 2012
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Pandraud, G. (author), Margallo-Balbas, E. (author), Sarro, P.M. (author)We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB?cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in...journal article 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012