Curvature Manipulation of Photomasks - Enhancing the imaging performance of immersion lithography equipment

This thesis investigates the feasibility of a photomask curvature manipulator in immersion lithography systems.

Mechatronics and Control Solutions for Increasing the Imaging Speed in Atomic Force Microscopy

This research is focused on improving the mechatronic design and control strategies of Atomic Force Microscopes (AFM) in order to increase the imaging speed of these instruments, while maintaining the resolution and accuracy of AFM. Different techniques are developed which have led to a faster lateral scanning speed, higher bandwidth control of...

Architecture-Centric Design: Modeling and Applications to Control Architecture Generation

Design activities, including control design, are becoming increasingly difficult due to a corresponding increase in product and product development complexity. Model-based (or driven) engineering, development and design have become common concepts related to modern complex product development practices. However, it is argued here that currently...