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Searched for: %2520
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Influence of seed layer on crystallinity and orientation of pulsed — DC sputtered AlN thin-films for piezoelectric actuators
Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
Robust Wafer-Level Thin-Film Encapsulation (Packaging) of Microstructures (MEMS) using Low Stress PECVD Silicon Carbide
Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate
Evaluation of an Empirical Model to Estimate and Optimize Mechanical Properties of PECVD SiC Films
Polarization-insensitive PECVD SiC waveguides for photonic sensing
Spray coating of photoresist for pattern transfer on high topography surfaces
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