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Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method (Microsystems & Nanoengineering, (2023), 9, 1, (63), 10.1038/s41378-023-00532-0)
Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method
Stretchable Binary Fresnel Lens for Focus Tuning
Single-Mask Fabrication of Temperature Triggered MEMS Switch for Cooling Control in SSL System
6 DOF Force and Torque Sensor for Micro-manipulation Applications
Suspended Submicron Silicon-Beam for High Sensitivity Piezoresistive Sensing
From 2-Dimensional Lithography To 3-Dimensional Structures
From 2D Lithography to 3D Patterning
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Pattern transfer on a vertical cavity sidewall using SU8
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