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Rajaraman, V. (author), Pakula, L.S. (author), Yang, H. (author), French, P.J. (author), Sarro, P.M. (author)Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...journal article 2011
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Jardinier, E. (author), Pandraud, G. (author), Pham, M.H. (author), French, P.J. (author), Sarro, P.M. (author)A photonic crystal waveguide biosensor in the visible is presented for biosensing. The sensor is applied to Refractive Index (RI) measurements. The sensitivity at different wavelength is presented for both air holes and air core configurations of photonic crystal waveguide (PCW) made of TiO2. It is shown that by using Atomic Layer Deposition ...journal article 2009
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- Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), French, P.J. (author), Sarro, P.M. (author) journal article 2006
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- French, P.J. (author), van Drieenhuizen, B.P. (author), Poenar, D. (author), Goosen, J.F.L. (author), Mallee, R. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author) journal article 1996