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Grabarnik, S. (author), Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS...journal article 2008