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Texture-related roughness of (Nb,Ti)N sputter-deposited films

Iosad, N.N. (author), van der Pers, N.M. (author), Grachev, S. (author), Zuiddam, M. (author), Jackson, B.D. (author), Dmitriev, P.N. (author), Klapwijk, T.M. (author)

journal article 2003