Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications

In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a...

Silicon-nitride nanosensors toward room temperature quantum optomechanics

Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators...

Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN_<i>x</i> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN_<i>x</i> membranes were fabricated and used as optomechanical resonators in a...