Insights into the effect of susceptor rotational speed in CVD reactor on the quality of 4H-SiC epitaxial layer on homogeneous substrates

In this work, 4H-SiC homoepitaxial layers were grown on 4°off-axis substrates at different susceptor rotation speeds by using a hot-wall horizontal CVD reactor. The effect of different susceptor rotation speed on the quality of 4H-SiC epitaxial layers in terms of thickness, thickness uniformity, crystallinity, surface morphology and...

An experimental study of vertical greenery systems for window shading for energy saving in summer

Past studies have demonstrated the remarkable energy-saving effect of vertical greenery systems. The vast majority of these works focus on opaque building walls. While external shadings on windows are more effective than these on walls. Inspired by the climbing plants (vines) raised outside windows by residents, the present study proposed the...