On-chip positionable waveguides for submicrometric photonic alignment

In this paper, we present positionable photonic waveguide arrays that are developed for optical chip-to-chip alignment. Partly suspended photonic structures, based on the Si3N4/SiO2 material platform, are equipped with thermal actuators enabling the free end of the structures to be positioned with submicrometer accuracy. A finite-element model...

Electrothermal actuators for SiO₂ photonic MEMS

This paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μm ) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are...