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Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum CommunicationsBonaldi, Michele (author), Borrielli, Antonio (author), Di Giuseppe, Giovanni (author), Malossi, Nicola (author), Morana, B. (author), Natali, Riccardo (author), Piergentili, Paolo (author), Sarro, Pasqualina M (author), Serra, E. (author), Vitali, David (author)In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a...journal article 2023
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Serra, E. (author), Borrielli, Antonio (author), Marin, Francesco (author), Marino, Francesco (author), Malossi, Nicola (author), Morana, B. (author), Piergentili, Paolo (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author)Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators...journal article 2021
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Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016