Searched for: author:"Bijster, R.J.F."
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Bijster, R.J.F. (author), Sadeghian Marnani, H. (author), van Keulen, A. (author)
Optical near-field technologies such as solid immersion lenses and hyperlenses are candidate solutions for high resolution and high throughput wafer inspection and metrology for the next technology nodes. Besides sub-diffraction limited optical performance, these concepts share the necessity of extreme proximity to the sample at distances that...
conference paper 2016