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Searched for: author%3A%22De+Graaf%2C+G.%22
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Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement
De Graaf, G. (author), Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)
journal article 2005