Mele, L. (author), Rossi, T. (author), Riccio, M. (author), Iervolino, E. (author), Santagata, F. (author), Irace, A. (author), Breglio, G. (author), Creemer, J.F. (author), Sarro, P.M. (author) This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as...
journal article 2011
