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Westerveld, W.J. (author), Pozo, J. (author), Harmsma, P.J. (author), Schmits, R. (author), Tabak, E. (author), Van den Dool, T.C. (author), Leinders, S.M. (author), Van Dongen, K.W.A. (author), Urbach, H.P. (author), Yousefi, M. (author)Recently there has been growing interest in sensing by means of optical microring resonators in photonic integrated circuits that are fabricated in silicon-on-insulator (SOI) technology. Taillaert et al. [Proc. SPIE6619, 661914 (2007)PSISDG0277-786X10.1117/12.738412] proposed the use of a silicon-waveguide-based ring resonator as a strain gauge....journal article 2012
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van Zeijl, E. (author), Schmits, R. (author), van den Berg, J. H. (author), Harmsma, P. J. (author), Westerveld, W.J. (author), Lagioia, M. (author), Bodis, P. (author), Ebeling, R. P. (author), Nieuwland, R. A. (author), Yang, S. (author)We present a platform for the deployment of SOI based sensors in commercial<br/>applications. The platform is designed from a systems perspective and includes all<br/>aspects of a SOI sensor system, including sensor head itself, the communications<br/>infrastructure and a customized interrogation system.conference paper 2010
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Sidorkin, V.A. (author), Alkemade, P.F.A. (author), Salemink, H.W.M. (author), Schmits, R. (author), Van der Drift, E. (author)A method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist is provided for enhanced pattern-transfer capabilities. The essence of the proposed method is to form a protective “cap” on top of the resist structure by means of electron-beam-induced deposition (EBID) in a self-aligned approach. This is...journal article 2009