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Spronk, J.W. (author), Bonse, M.H.W. (author)Abstract of WO 9641999 (A1) There is described a measuring system for detecting a positional variation of an object (V), comprising: a reference device (10) defining an X-direction; a first group (30) of at least three sensor members (31, 32, 33) for providing measuring signals indicative of a positional variation in a Z-direction relative to...patent 1996