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Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Enoksson, P. (author), Higino Correia, J. (author), Wolffenbuttel, R. (author)An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed...journal article 2012
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Wolffenbuttel, R. (author)Abstract of US 4749851 (A) Method and system for determining the wave-length of light impinging onto the surface of a light sensitive semiconductor structure by determining the photocurrent therethrough. The semiconductor structure consists of a substrate of one conductivity type, an adjoining epitaxial layer of a second conductivity type, and...patent 1988