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Sattari, R. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author)This study presents a novel manufacturing process and design towards an enhanced sensitivity of an in-package relative humidity sensor. The device comprises multi-width interdigital electrodes which make oxide pillars appear during wet chemical etching in the fabrication process. Those oxide pillars appear only in wider areas while completely...conference paper 2023