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Searched for: collection%253Air
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Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring
Integrated MEMS: Opportunities & Challenges
PECVD silicon carbide surface micromachining technology and selected MEMS applications
Atomic layer deposition of TiO2 photonic crystal waveguide biosensors
Robust Wafer-Level Thin-Film Encapsulation (Packaging) of Microstructures (MEMS) using Low Stress PECVD Silicon Carbide
Actuated elastomers with rigid vertical electrodes
Polarization-insensitive PECVD SiC waveguides for photonic sensing
The development of a low-stress polysilicon process compatible with standard device processing
Searched for: collection%253Air
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