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Hemmes, K. (author), WIND, M.M. (author), Lepoole, R. (author), Habing, P.E. (author)Abstract of WO 9416310 (A1) Ellipsometer comprising at least a Zeeman laser (Z) to generate two beams (g1, g2) which are slightly shifted in frequency and (after transmission through a birefringent crystal (quarter-wave plate)) are both polarized linearly but perpendicular to one another, a non-polarizing beam splitter (N) downstream of which a...patent 1994