Information-Efficient Metagrating for Transverse-Position Metrology

We introduce an optimal metagrating design for transverse-position metrology in presence of photon shot noise. The proposed working principle is closely related to the formation of a phase vortex in the diffraction orders in the parameter space. Using the topological robustness, we optimize the design and compress all the transverse-position...

Noniterative spatially partially coherent diffractive imaging using pinhole array mask

We propose and experimentally demonstrate a noniterative diffractive imaging method for reconstructing the complex-valued transmission function of an object illuminated by spatially partially coherent light from the far-field diffraction pattern. Our method is based on a pinhole array mask, which is specially designed such that the...

Angular momentum properties of hybrid cylindrical vector vortex beams in tightly focused optical systems

Optical angular momenta (AM) have attracted tremendous research interest in recent years. In this paper we theoretically investigate the electromagnetic field and angular momentum properties of tightly focused arbitrary cylindrical vortex vector (CVV) input beams. An absorptive particle is placed in focused CVV fields to analyze the optical...

Position correction in ptychography using hybrid input-output (HIO) and cross-correlation

Ptychography is a form of coherent diffractive imaging; it employs far-field intensity patterns of the object to reconstruct the object. In ptychography, an important limiting factor for the reconstructed image quality is the uncertainty in the probe positions. Here, we propose a new approach which uses the hybrid input-output algorithm and...

Phase detection of coherence singularities and determination of the topological charge of a partially coherent vortex beam

In the theory of partial coherence, coherence singularities can occur in the spectral degree of coherence (SDOC): in case the fields at two different points are completely uncorrelated, the phase of the SDOC is undefined. For a partially coherent vortex beam, the detection of coherence singularities is linked to the measurement of topological...

Model-independent noise-robust extension of ptychography

A noise-robust extension of iterative phase retrieval algorithms that does not need to assume a noise model is proposed. It works by adapting the intensity constraints using the reconstructed object. Using a proof-of-principle ptychographic experiment with visible light and a spatial light modulator to create an object, the proposed method is...

Spatial coherence measurement and partially coherent diffractive imaging using self-referencing holography

The complete characterization of spatial coherence is extremely di cult because the mutual coherence function (MCF) is a complex-valued function of four independent Cartesian coordinates. This di culty limits the ability to control and to optimize the spatial coherence in a broad range of key applications. Here we propose an e cient and...

Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

A novel non-iterative phase retrieval method is proposed and demonstrated with a<br/>proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive...

Lateral position correction in ptychography using the gradient of intensity patterns

Ptychography, a form of Coherent Diffractive Imaging, is used with short wavelengths (e.g. X-rays, electron beams) to achieve high-resolution image reconstructions. One of the limiting factors for the reconstruction quality is the accurate knowledge of the illumination probe positions. Recently, many advances have been made to relax the...

Phase retrieval of the full vectorial field applied to coherent Fourier scatterometry

Coherent Fourier scatterometry is an optical metrology technique that utilizes the measured intensity of the scattered optical field to reconstruct certain parameters of test structures written on a wafer with nano-scale accuracy. The intensity of the scattered field is recorded with a camera and this information is used to retrieve the...

Non-iterative phase retrieval by phase modulation through a single parameter

We report on a novel non-iterative phase retrieval method with which the complex-valued transmission function of an object can be retrieved with a non-iterative computation, with a limited number of intensity measurements. The measurements are taken in either real space or Fourier space, and for each measurement the phase in its dual space is...

Combining ptychographical algorithms with the Hybrid Input-Output (HIO) algorithm

In this article we combine the well-known Ptychographical Iterative Engine (PIE) with the Hybrid Input-Output (HIO) algorithm. The important insight is that the HIO feedback function should be kept strictly separate from the reconstructed object, which is done by introducing a separate feedback function per probe position. We have also...

Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory

In several optical systems, a specific Point Spread Function (PSF) needs to be generated. This can be achieved by shaping the complex field at the pupil. The Extended Nijboer-Zernike (ENZ) theory relates complex Zernike modes on the pupil directly to functions in the focal region. In this paper, we introduce a method to engineer a PSF using the...