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Nanbakhsh, K. (author), Ritasalo, R. (author), Serdijn, W.A. (author), Giagka, Vasiliki (author)In this work, we investigate the insulating performance of an atomic layer deposited (ALD) HfO2 - polymer bilayer for platinum (Pt) metallization. As test vehicles, Pt interdigitated comb structures (IDC) were designed and fabricated on SiO2/Si substrates. The IDCs were first coated with a 100 nm thin HfO2 ALD layer. A group of samples was...conference paper 2020