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Dolleman, R.J. (author), Chakraborty, Debadi (author), Ladiges, Daniel R. (author), van der Zant, H.S.J. (author), Sader, John E. (author), Steeneken, P.G. (author)
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing...
journal article 2021