Tran, A.T. (author), Pandraud, G. (author), Tichelaar, F.D. (author), Nguyen, M.D. (author), Schellevis, H. (author), Sarro, P.M. (author) The structure of AlN layers grown on Ti with and without an AlN interlayer between the Si substrate and the Ti layer is investigated. The AlN grains take over the orientation of the Ti columnar grains in both cases. Surprisingly, the Ti grains do not take over completely the orientations of the AlN grains of the interlayer, and show the same...
journal article 2013
