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Heerens, W.C. (author), Laham, C.D. (author), Holman, A.E. (author)
An XY-displacement device (1) with a four-fold symmetry comprises a reference frame (10); an object mount (20) for holding an object (22) to be displaced; an X-manipulator (100) coupled between the reference frame (10) and the object mount (20), which provides a rigid coupling between the object mount (20) and a piezoelectric X-actuator (140),...
patent 1997