The Relation Between Precursor Gas Flows,Thickness Dependent Material Phases, andOpto-Electrical Properties of Dopeda/nc-SiOX≥0:H Films

Doped layers are a determining factor for the performance of photovoltaic devices such as silicon heterojunction and thin film silicon solar cells. The material properties of doped hydrogenated amorphous/nanocrystalline silicon-oxide (a/nc-SiO X≥0 :H) films processed by plasma-enhanced chemical vapor deposition generally exhibit a tradeoff...