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Kruit, P. (author), Gheidari, A.M. (author), Ren, Y. (author)The invention relates to an apparatus for inspecting a surface of a sample, wherein the apparatus comprises : at least one charged particle source for generating an array of primary charged particle beams, a condenser lens for directing all charged particle beams to a common cross-over, a lens system for directing the primary charged particle...patent 2013