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Van Veldhuizen, S. (author), Vuik, K. (author), Kleijn, C.R. (author)
In this study various numerical schemes for simulating 2D laminar reacting gas flows, as typically found in Chemical Vapor Deposition (CVD) reactors, are proposed and compared. These CVD systems are generally modeled by means of many stiffly coupled elementary gas phase reactions between a large number of reactants and intermediate species. The...
conference paper 2006