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Krieg, M.L. (author), Braat, J.J.M. (author)A previously reported interferometer without intermediate optics is used to perform measurements on an aspherical extreme ultraviolet lithography mirror substrate. Acousto-optic modulation based phase shifting is used together with a novel phase retrieval algorithm to retrieve the phase distribution from our interferograms. The phase...conference paper 2005
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Krieg, M.L. (author), Braat, J.J.M. (author)This paper will illustrate several approaches to retrieving the shape of aspherical reflective surfaces as used in EUV Lithography, from measurements from a previously reported angstrom-accuracy interferometer. First, the working principles of the interferometer will be reviewed, and typical measurement data expected from the instrument will be...conference paper 2004