Technology Development for MEMS: A Tutorial

Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simple processing that was part of the early integrated circuit (IC) industry. As the IC industry developed, silicon sensors could benefit from the technological advances. As silicon sensors advanced, there came the need for new technologies...

Modeling Strategies for Electro-Mechanical Microsystems with Uncertainty Quantification

Microsystems are very small sensors and actuators, manufactured with the same technology as computer chips. Well known applications of these machines are the acceleration sensors in the Wii game console and the iPhone. At the micrometer length scales of microsystems the physical forces behave different when compared to devices operating in the...