- document
-
Gkouzou, A. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...journal article 2020