Calibrated quantum thermometry in cavity optomechanics

Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...

Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN_<i>x</i> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN_<i>x</i> membranes were fabricated and used as optomechanical resonators in a...