Inductively coupled plasma reactive ion etching of high aspect ratio structures on 4H-SiC for MEMS applications

As silicon carbide(SiC) gets more and more attention from the semiconductor industry due to its robust mechanical and chemical properties, reliable and standardized processing technologies such as reactive ion etching(RIE) for SiC are in great demand. This is because of the difficulty and challenge of fabricating micro devices on the SiC...

Optimization of a plasma etching machine for failure analysis of semiconductors

Microwave Induced Plasma (MIP) is an advanced decapsulation tool developed by Jiaco Instruments. The goal of this thesis is to optimise the current MIP system. There are two directions: 1. Improve the etching rate. 2. Find selectivity between different materials (Si, SiO2, SiN). The experiments are divided into two parts in total, improved...

Autonomous Wireless Charging System for Robot Swarms: Robot Control and Navigation

The goal of this thesis is to develop a ROS package that facilitates the control and navigation of a Duckiebot robot. With the rise of robot swarms the need for autonomous charging system for robots is increasing. An implementation for decentralised autonomous behaviour for a Duckiebot for a wireless charging system in a Duckietown environment...

Decoding EEG signals

In the context of designing a real-time brain-computer interface for playing a game using the OpenBCI Ultracortex "Mark IV" headset, this paper focuses on the work of the decoding subgroup. The primary responsibility is to analyse EEG data retrieved from the OpenBCI headset and classify the intention of the user. Our objective is to achieve a...