NiTi thin films on a flexible substrate: Fabrication & Characterization

NiTi (Nickel Titanium) is a shape memory alloy (SMA) known for shape memory effect and superelasticity. The shape memory effect and superelasticity allows NiTi to be strained reversibly unto 6-8%. NiTi thin films are of technological interest as actuator materials in microelectromechanical systems (MEMS) because they possess a large deformation...