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van Kessel, L.C.P.M. (author)Electrons with an energy ranging from 0 to 50 keV are among the most versatile tools in nanotechnology. A common example is the scanning electron microscope (SEM), which focuses an electron beam with an energy ranging from several hundred eV to tens of keV on a sample. When landing on the sample, the electrons in the beam penetrate the material....doctoral thesis 2022