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Venugopal, V. (author)In situ thermal helium desorption spectrometry (THDS) has been used to characterize defects and thermal stability of nanothin Cu films (0.5-30 nm) deposited on Mo and Ta by electron beam evaporation in ultrahigh vacuum. The substrates used were Mo(110), Mo(100), polycrystalline Mo, Ta(110) and Ta(100). Cu/Mo and Cu/Ta are heteroepitaxial systems...doctoral thesis 2005