Searched for: department:"BioMechanical%5C%2BEngineering"
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Dunning, A.G. (author)
This paper presents the first zero stiffness six degrees of freedom (DoF) compliant precision stage. To deal with problems like backlash, friction and lubrication for performing ultra-precise positioning in a vacuum environment, a novel compliant structure is proposed. All six degrees of freedom are statically balanced (i.e. near zero stiffness)...
master thesis 2011