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Kadlečíková, Magdaléna (author), Vančo, Ľubomír (author), Breza, Juraj (author), Mikolášek, Miroslav (author), Hušeková, Kristína (author), Fröhlich, Karol (author), Procel Moya, P.A. (author), Zeman, M. (author), Isabella, O. (author)We compared the morphology and Raman response of nanoscale shaped surfaces of Si substrates versus monocrystalline Si. Samples were structured by reactive ion etching, and four of them were covered by a RuO<sub>2</sub>-IrO<sub>2</sub> layer. Raman bands, centred at approx. 520 cm<sup>–1</sup>, belonging to samples processed by etching the Si...journal article 2022