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Melskens, J. (author), Eijt, S.W.H. (author), Schouten, M. (author), Vullers, A.S. (author), Mannheim, Awital (author), Schut, H. (author), Macco, Bart (author), Zeman, M. (author), Smets, A.H.M. (author)The nanostructure of hydrogenated amorphous silicon (a-Si:H) is studied by means of doppler broadening positron annihilation spectroscopy (DB-PAS) and Fourier transform infrared (FTIR) spectroscopy. The evolution of open volume deficiencies is monitored during annealing, demonstrating that small vacancies and other small vacancy clusters that...journal article 2017