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Gao, J.R. (author), Hajenius, M. (author), Tichelaar, F.D. (author), Klapwijk, T.M. (author), Voronov, B. (author), Grishin, E. (author), Gol'tsman, G. (author), Zorman, C.A. (author), Mehregany, M. (author)The authors have realized NbN (100) nanofilms on a 3C-SiC (100)/Si(100) substrate by dc reactive magnetron sputtering at 800?°C. High-resolution transmission electron microscopy (HRTEM) is used to characterize the films, showing a monocrystalline structure and confirming epitaxial growth on the 3C-SiC layer. A film ranging in thickness from 3.4...journal article 2007