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Sammak, A. (author), Aminian, M. (author), Qi, L. (author), De Boer, W.B. (author), Charbon, E. (author), Nanver, L.K. (author)The selective epitaxial growth of Ge-on-Si followed by in-situ deposition of a nm-thin Ga/B layer stack (PureGaB) has previously been shown to be a robust CMOS-compatible process for fabrication of Ge-on-Si photodiodes. In this paper, strategies to improve the control and reproducibility of PureGaB Ge-on-Si photodiode fabrication by reducing the...journal article 2014