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Searched for: department%3A%22Microelectronics%255C%252B%2526%255C%252BComputer%255C%252BEngineering%22
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Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning
Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)
journal article 2006
