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Searched for: department%3A%22Microelectronics%255C%252B%2526%255C%252BComputer%255C%252BEngineering%22
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Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper
Duc, T.C. (author), Lau, G.K. (author), Sarro, P.M. (author)
journal article 2008
