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Searched for: faculty%3A%22Applied%255C%252BSciences%22
(1 - 14 of 14)
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Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist
Size and shape control of sub-20 nm patterns fabricated using focused electron beam-induced processing
Nanofabrication with a helium ion microscope
Saddle-point construction in the design of lithographic objectives, part 1: Method
Saddle-point construction in the design of lithographic objectives, part 2: Application
Vectorial diffraction of extreme ultraviolet light and ultrashort light pulses
Network search method in the design of extreme ultraviolet lithographic objectives
Looking for order in the optical design landscape
Designing lithographic objectives by constructing saddle points
Optimization and analysis of deep-UV imaging systems
Saddle points in the merit function landscape of lithographic objectives
Generating saddle points in the merit function landscape of optical systems
Correction of the phase retardation caused by intrinsic birefringence in deep UV lithography
The effect of intrinsic birefringence in deep UV-lithography
Searched for: faculty%3A%22Applied%255C%252BSciences%22
(1 - 14 of 14)
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