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Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author), Salemink, H.W.M. (author)The photonic properties of two classes of wavelength-sized cavities are reported for deeply etched InP/InGaAsP/InP planar photonic crystals. The high aspect, deeply etched structures are studied as potential building blocks for nonmembrane type photonic devices in standard InP photonic integrated circuits. The first class consists of cavities of...journal article 2009
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Carlström, C.F. (author), Van der Heijden, R. (author), Andriesse, M.S.P. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)An extensive investigation has been performed on inductively coupled plasma etching of InP. An important motivation for this work is the fabrication of high-aspect-ratio holes for photonic crystals. The essential chemistry is based on Cl2 with the addition of N2 or O2 for sidewall passivation. The influence of different process parameters such...journal article 2008
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Caro, J. (author), Roeling, E.M. (author), Rong, B. (author), Nguyen, H.M. (author), Van der Drift, E.W.J.M. (author), Rogge, S. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Salemink, H.W.M. (author)A high-contrast-ratio (30 dB) photonic band gap in the near-infrared transmission of hole-type GaN two-dimensional photonic crystals (PhCs) is reported. These crystals are deeply etched in a 650 nm thick GaN layer grown on sapphire. A comparison of the measured spectrum with finite difference time domain simulations gives quantitative agreement...journal article 2008
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Van der Heijden, R. (author), Carlström, C.F. (author), Snijders, J.A.P. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Salemink, H.W.M. (author), Kjellander, B.K.C. (author), Bastiaansen, C.W.M. (author), Broer, D.J. (author), Van der Drift, E. (author)Polymer filling of the air holes of indium-phosphide-based two-dimensional photonic crystals is reported. After infiltration of the holes with a liquid monomer and solidification of the infill in situ by thermal polymerization, complete filling is proven using scanning electron microscopy. Optical transmission measurements of a filled photonic...journal article 2006